Wafer characteristic evaluation device - List of Manufacturers, Suppliers, Companies and Products | IPROS GMS

8-inch wafer compatible type CVmap92 A/B

8-inch wafer compatible type

This is a CV/IV measurement system using a mercury probe method that excels in reproducibility and safety. It can measure the characteristics of various types of wafers, including Si, compounds, SOI, SiC, and bulk wafers. Users can specify up to 49 measurement sites, and the system allows for mapping measurements of C-V, I-V characteristics, TDDB, Vbd, Qbd oxide breakdown evaluation, Dit, doping concentration, oxide film thickness, Low-k, High-k, and more.